
2
Chapter
Basic Operations
E LT-9001-IM
2-25
The default values and setting range of the LT-9001 parameters are listed below.
Default Values and Setting Range
Setting contents
Setting range
Default value
Notes
Lower limit Upper limit
Measurement range 1 of area1
– 550 or lower
+ 550 or higher
– 400
Area
Measurement range 2 of area1
– 550 or lower
+ 550 or higher
– 300
Measurement range 1 of area2
– 550 or lower
+ 550 or higher
+ 300
Measurement range 2 of area2
– 550 or lower
+ 550 or higher
+ 400
[(scan width/2)+scanning
Scan Center position – 550 + 550 0 center position] is within
the range of ±550
Dark
Setting range of [HI] 1 255 100
LO<HI
Setting range of [LO] 0 254 20
Mask
Setting range of [HI] – 400 + 400 + 100
Setting range of [LO] – 400 + 400 – 100
Light intensity level 0 255 30
Display
Upper limit – 9999.99 + 9999.99 + 300.00
Lower limit<Upper limit
Lower limit – 9999.99 + 9999.99 – 300.00
Tolerance
Upper limit – 9999.99 + 9999.99 + 200.00
Lower limit<Upper limit
Lower limit – 9999.99 + 9999.99 – 200.00
Offset Offset – 9999.99 + 9999.99 0.00
Analog
Analog + 10V – 9999.99 + 9999.99 + 200.00
– 20.00
Analog – 10V – 9999.99 + 9999.99 – 200.00
Measured value of the 1st point
– 9999.99 + 9999.99 0.00
( < and < )
Calibration
Calibrated value of the 1st point
– 9999.99 + 9999.99 0.00
and (0.5 Span value after the
Measured value of the 2nd point
– 9999.99 + 9999.99 + 100.00
calibration is done<4.0000)
Calibrated value of the 2nd point
– 9999.99 + 9999.99 + 100.00
Display
Upper limit – 9999.99 + 9999.99 + 300.00
Lower limit<Upper limit
Lower limit – 9999.99 + 9999.99 – 300.00
Tolerance
Upper limit – 9999.99 + 9999.99 + 200.00
Lower limit<Upper limit
Lower limit – 9999.99 + 9999.99 – 200.00
Offset Offset – 9999.99 + 9999.99 0.00
Analog
Analog + 10V – 9999.99 + 9999.99 + 200.00
– 20.00
Analog – 10V – 9999.99 + 9999.99 – 200.00
Measured value of the 1st point
– 9999.99 + 9999.99 0.00
( < and < )
Calibration
Calibrated value of the 1st point
– 9999.99 + 9999.99 0.00
and (0.5 Span value after
Measured value of the 2nd point
– 9999.99 + 9999.99 + 100.00
calibration<4.0000)
Calibrated value of the 2nd point
– 9999.99 + 9999.99 + 100.00
Tolerance
Upper limit – 999999 + 999999 + 20000
Lower limit<Upper limit
Lower limit – 999999 + 999999 – 20000
Offset Offset – 999999 + 999999 0
Analog
Analog + 10V – 999999 + 999999 + 20000
– 20.00
Analog – 10V – 999999 + 999999 – 20000
Measured value of the 1st point
– 999999 + 999999 0
( < and < )
Calibration
Calibrated value of the 1st point
– 999999 + 999999 0
and (0.5 Span value after
Measured value of the 2nd point
– 999999 + 999999 + 10000
calibration<4.0000)
Calibrated value of the 2nd point
– 999999 + 999999 + 10000
Common
Units specified in the measurement selection and in the area setting
Slant, ΔSlant
Area
The setting ranges differ according
to the manufacturing variations of
individual measuring units.
Displacement, Transparent
thickness, Profile
1
1
2
3
4
1
2
3
4
1
2
3
4
2
1
2
1
2
1
2
1
3 2 4
1
2 43
1
1
2 43
1
2
2
||
||
||
[µm]
[°]
[µm
2
]
Kommentare zu diesen Handbüchern