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3
Chapter
Operations and Function Settings in the Displacement Mode
E LT-9001-IM
3-15
This section describes the basic settings for
displacement measurement.
This section describes the scanning function for
stable measuring.
Scan width/interval
You can see irregularities on a zoomed in surface even
if the measurement target surface looks flat.
Depending on the irregularity, measurement cannot be
done correctly because of insufficient reflective light.
Stable measuring can be realized by making the
laser beam swing (scan) and canceling any points
that do not have enough reflective light.
■ LT-9010 (M)
■ LT-9030 (M)
SCAN
Meauring
unit
Pitch
(Interval : 1, 2, 5, 10μm)
Measurement targetMeasurement target
(Width : OFF, 4,120, 250, 500,100μm)
Scan width
Meauring
unit
Scan width
Measurement target
(Width : OFF, 4,120, 240, 400, 560μm)
Pitch
(Interval : 1, 2, 4, 8μm)
Basic Settings
Select a combination of scanning width and pitch
from the table shown below.
■ LT-9010 (M)
■ LT-9030 (M)
OFF No scanning
120/2
120/5
120/10
250/2
250/5
250/10 Scan width (Width):120/250/500/1100µm
500/2 Pitch (Interval): 2/5/10 µm
500/5 Select a combination from the above.
500/10
1100/2
1100/5
1100/10
4/1 Fine-scanning: about 4 µm
OFF No scanning
120/2
120/4
120/8
240/2
240/4
240/8 Scan width (Width):120/240/400/560µm
400/2 Pitch (Interval): 2/4/8 µm
400/4 Select a combination from the above.
400/8
560/2
560/4
560/8
4/1 Fine-scanning: about 4 µm
- LT-9001 Series 1
- Introduction 2
- Safety Precautions 3
- Measurement target 5
- Scan straightness 5
- Handling 5
- Effect of atmospheric motions 5
- Precaution on CE Marking 6
- Organization of this Manual 7
- Table of Contents 8
- Chapter 8 RS-232C 10
- Chapter 9 Specifications 10
- Appendices 10
- Outline of the LT-9001 11
- System Configuration 12
- Checking the Package Contents 13
- Controller 14
- Measuring Unit 15
- Remote Control Console 16
- Mounting and Connecting Parts 17
- Connection 18
- Outline of Basic 19
- Operations 19
- Displacement Mode 20
- Profile Mode 20
- Program mode screen 21
- Run mode screen 21
- Run Mode 22
- Program Mode 23
- Program Function 26
- Flow of Measurement 27
- Selecting an Item 29
- Entering a Value 29
- Operational Flow 30
- Using the Displacement Mode 31
- Measuring the Displacement 33
- Using the Profile Mode 34
- Setting the Area 36
- Measuring Height Differences 37
- Measuring 38
- Resetting the Device to the 40
- Factory Settings 40
- Scan center 41
- 1st point/measured value 42
- Offset – 999999 + 999999 0 43
- Scan Width 44
- Outline of Displacement 47
- Display Screens 48
- Measurement Screen 49
- Light Intensity Screen 50
- Pause Screen 55
- SELECT SURFACE 58
- OUT Settings 60
- Scan width 61
- Basic Settings 62
- DARK ALARM 63
- Outline of Profile Mode 67
- Types of Screens 68
- Program mode 68
- Run mode 68
- Display of Profile Waveform 72
- Setting the position 73
- Slant correction 77
- WIDTH/INTERVAL 80
- SMOOTH (Smoothing) 83
- PROF OUT (Profile Output) 85
- Outline of Common Operations 87
- X : 2500 μm 88
- Y : 2000 μm 88
- Hold Function 89
- Auto-zero Function 90
- Keylock Function 91
- Program Change 92
- (Output) 94
- HOLD MODE (Measurement mode) 95
- Upper limit of tolerance 96
- Lower limit of tolerance 96
- Measured value 96
- Judgment 97
- Judgment standby status 97
- OUTPUT Settings 100
- ANALOG output 101
- CALIB (Calibration) 102
- E LT-9001-IM 103
- OPTIONAL Settings 104
- DISPLAY UNIT 105
- GAIN (Sensitivity) 106
- Setting up the Basic 107
- Settings for the Overall Unit 107
- List of Default Values 108
- Environment Setting Items 108
- Beep sound ( page 6-7) 109
- Coefficient ( page 6-7) 109
- RS-232C Interface 111
- Items that can be set 112
- Coefficient 113
- Interface Language 113
- Beep Sound 113
- Controlling and Outputting 115
- Terminal number 116
- Terminal 116
- Control I/O 117
- Functions of the I/O Signals 119
- VIDEO Output 119
- Auto-zero input 120
- Program No. change input 120
- Binary output 121
- Laser remote input 121
- Electrical Specifications 122
- Timing Chart 123
- Timing Details (LT-9010 (M)) 127
- Timing Details (LT-9030 (M)) 128
- Connecting to External 131
- Devices via RS-232C 131
- Specifications 132
- Outline of Command Format 133
- Command Details 135
- Profile waveform data output 136
- Timing ON/OFF 136
- Auto-zero ON/OFF 137
- Program No. change 137
- Keylock ON/OFF 137
- S D , O A , x i 138
- Select surface setting 140
- Change HOLD mode setting 140
- Offset setting 140
- Analog scaling setting 141
- Calibration setting 141
- Area setting 141
- Area range setting 141
- Scan width/interval setting 142
- Scan center position setting 142
- FINE mode 142
- Dark-out setting 142
- Dark-out range setting 143
- Mask setting 143
- Mask range setting 143
- Auto slant correction setting 144
- Gain setting 144
- S R , O F , x 145
- ASCII Code Table (Reference) 146
- Synchronization 147
- Output format 148
- Specifications of the 149
- Status Table 152
- Display Update Cycle 154
- Response Delay Time 154
- Outside Dimensions 155
- Troubleshooting 158
- Error Messages 160
- Optional Product List 161
- Parameter Memo 162
- 0.00 0.00 163
- Profile mode 164
- Revision history 174
- WARRANTIES AND DISCLAIMERS 175
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