
Chapter 1 Laser Safety Precautions
1.1 Classification .......................................................................................... 2
1.2 Warning Labels ...................................................................................... 2
1.3 Label Location ........................................................................................ 3
1.4 Safety Consideration ............................................................................. 3
1.5 Safety Features Provided with the LS-5000 Series ............................. 4
1.6 Preparation for Operation ..................................................................... 6
Chapter 2 Before Using the LS-5000 Series
2.1 System Configuration and Connections ............................................. 8
2.1.1 System Configuration................................................................................8
2.1.2 Connection Procedure .............................................................................. 9
2.2 Names and Functions of Indicators and Switches ........................... 12
2.3 Part Names ........................................................................................... 13
Chapter 3 Quick Start Reference
3.1 Quick Start Reference ......................................................................... 16
3.1.1 Procedure for Starting Measurement ...................................................... 16
Chapter 4 Installation
4.1 Mounting the Scanning Head ............................................................. 18
4.2 Mounting the Controller ...................................................................... 19
Chapter 5 Outline of Measurements
5.1 Area/Segment/Edge ............................................................................. 22
5.2 Normal mode ........................................................................................ 22
5.2.1 DIA mode ................................................................................................ 23
5.2.2 T.EDGE (TOP EDGE) mode/B.EDGE (BOTTOM EDGE) mode ............ 23
5.2.3 SEG (m,n) mode ..................................................................................... 23
5.3 Pitch mode ............................................................................................ 24
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Contents
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